Ventilation – Clean room
Reexamination Certificate
2007-04-17
2007-04-17
Wilson, Gregory (Department: 3749)
Ventilation
Clean room
C055S385200
Reexamination Certificate
active
10614564
ABSTRACT:
A self-contained ventilator includes a housing having a support member for supporting a pollution source. A filter is further disposed in the housing for filtering contaminants emitted from the pollution source. A conduit is adapted to connect to the housing to provide non-housing communication between portions of the housing. A fan is situated in the conduit to generate an airflow that follows a path through the housing, through the conduit, and back to the housing. The airflow entrains the contaminants such that the contaminants are captured by the filter upon passage of the airflow through the filter.
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Chen Shih-Shiung
Fang Chun-Li
Hsieh Tsung-Chi
Jang Ruei-Hung
Tseng Wen-Hung
Haynes and Boone LLP
Taiwan Semiconductor Manufacturing Company , Ltd.
Wilson Gregory
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