Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1987-04-27
1989-03-14
Niebling, John F.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
204298, 118724, 118716, C23C 1400
Patent
active
048122173
ABSTRACT:
A process and apparatus for cleaning then coating articles such as circuit board panels with a metallic coating encompasses an enclosed evacuated chamber having a controlled low pressure gaseous process environment. The articles to be cleaned, then coated with a metallic deposit are continuously fed into the enclosed chamber through an air lock mechanism that permits the evacuated chamber to remain at its predetermined pressure and gaseous composition. Included within the chamber are a plurality of transport paths or panel carrying tracks. The articles to be cleaned, then coated are continuously transported along the various tracks while being coated.
The plurality of tracks are positioned to be substantially parallel with each other so that articles on each track follow paths similar in direction and substantially equidistant from one another. A plurality of bidirectional coating sources are sequentially positioned on both sides of each article transport track so that both sides of the panels are coated.
REFERENCES:
patent: 2146025 (1939-05-01), Penning
patent: 3779885 (1973-12-01), Labedan et al.
patent: 3852181 (1974-12-01), Cirkler et al.
patent: 3856654 (1974-12-01), George
patent: 3891536 (1975-06-01), Glaser et al.
patent: 4175030 (1979-11-01), Love et al.
patent: 4194962 (1980-03-01), Chambers et al.
patent: 4239611 (1980-12-01), Morrison, Jr.
patent: 4265729 (1981-05-01), Morrison, Jr.
patent: 4351697 (1982-09-01), Shanefield et al.
patent: 4394236 (1983-07-01), Robinson
patent: 4426275 (1984-01-01), Meckel et al.
patent: 4444848 (1984-04-01), Shanefield et al.
patent: 4486289 (1984-12-01), Parsons et al.
patent: 4501225 (1985-02-01), Nagao et al.
patent: 4576700 (1986-03-01), Kadokura et al.
patent: 4580619 (1986-04-01), Aitken
New West Modular System Features Announcement Sheet.
George Carroll H.
Rust Ray D.
American Telephone and Telegraph Company AT&T Bell Laboratories
Marquis Steven P.
Niebling John F.
Steinmetz Alfred G.
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