Optics: measuring and testing – By alignment in lateral direction – With light detector
Patent
1995-12-26
1998-05-26
Hantis, K.
Optics: measuring and testing
By alignment in lateral direction
With light detector
2505593, G01B 1100
Patent
active
057575037
ABSTRACT:
A method and apparatus measures a deviation in alignment between two components of a product wherein each component is characterized by a respective pattern and wherein each pattern comprises respective elements. The centroid of each element in each respective pattern is indicated, and based on the centroid indications, the center of each respective pattern is indicated. The deviation in alignment between the two components is determined as a function of the indicated position of the centers of the respective patterns, and positioning of the components is controlled as a function of the indicated position of the centers of the respective patterns.
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Brady Michael Francis
Nguyen Hung Ngoc
Hantis K.
Lucent Technologies - Inc.
Olson Katharyn E.
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