Method and apparatus for fabricating flat panel display

Details Method and apparatus for fabricating flat panel display Method and apparatus for fabricating flat panel display

2007-09-25

2007-09-25

Tran, Binh X. (Department: 1765)

Etching a substrate: processes

Forming or treating article containing a liquid crystal...

C216S042000, C216S043000, C216S054000

Reexamination Certificate

active

10963550

ABSTRACT:
A method of fabricating a flat panel display device including: coating an etch-resist on a thin film; forming a soft mold having a groove and a protrusion for patterning the thin film; treating an end surface of the protrusion; applying the soft mold to the etch-resist to form an etch-resist pattern; separating the soft mold from the etch-resist pattern; and etching the thin film by using the etch-resist pattern to form a thin film pattern.

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