Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2006-12-29
2011-11-01
Garber, Charles (Department: 2812)
Semiconductor device manufacturing: process
With measuring or testing
Reexamination Certificate
active
08048688
ABSTRACT:
A method and apparatus for the evaluation and improvement of the mechanical and thermal properties of carbon-nanotube (CNT) and carbon nanofiber (CNF) arrays grown on a substrate is disclosed. The Young's modulus of a CNT/CNF material is measured by applying an axial compressive force on the CNT/CNF array and measuring the applied forces and the induced displacements. Also disclosed are the evaluation of the nonlinear stress-strain relationship of the CNT/CNF material, increasing of the Young's modulus and decreasing the thermal resistance by application of a compressive load, the application of rapid thermal annealing to improve the quality of the CNT/CNF material and to reduce the interfacial thermal resistance, improvement of the bonding strength of the CNT/CNF array to a substrate, evaluation of the bonding strength of the CNT/CNF array to a substrate, evaluation of the shearing force at failure, and an analytical stress model that enables one to predict the interfacial shearing stress from the measured force.
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Suhir Ephraim
Xu Yuan
Zhang Yi
Garber Charles
Harness & Dickey & Pierce P.L.C.
Samsung Electronics Co,. Ltd.
Stevenson Andre′ C
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