Method and apparatus for evaluating thin films

Details Method and apparatus for evaluating thin films Method and apparatus for evaluating thin films

2005-12-08

2009-06-09

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C250S311000

Reexamination Certificate

active

07544935

ABSTRACT:
A method for evaluating thin films comprises the steps of inputting measurement conditions, generating electron beams from an electron source to condense the electron beams to a specimen by a condenser lens, enlarging the electron beams transmitted by the specimen with imaging lenses to image an enlarged image of the specimen, acquiring elemental maps of the specimen with an element analyzer to display the acquired elemental maps, measuring a length of the elemental maps, and correcting the measurement conditions. Disclosed is an evaluating apparatus that implements the above evaluating method.

REFERENCES:
patent: 2004/0188608 (2004-09-01), Kaneyama
patent: 2004/0211899 (2004-10-01), Ezumi et al.
patent: 07-311165 (1995-11-01), None
Grogger, et al. “Energy-filtering TEM at high magnification: spatial resolution and detection limits” Ultramicroscopy 96 (2003) 481-489.

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