Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1989-06-06
1991-02-05
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250306, 250307, G01N 23203
Patent
active
049907794
ABSTRACT:
The strains in crystals are evaluated by quantifying the sharpness of an electron channeling pattern and determining changes in the quantified sharpness of the electron channeling pattern. There is such a close correlation between the sharpness of the electron channeling pattern and the strains in crystals that the latter can be evaluated in terms of changes in the former. An apparatus for evaluating strains in crystals comprises a scanning electron microscope having a function to form an electron channeling pattern and an image analyzer having a function to quantify the sharpness of an electron channeling pattern.
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Funaki Shuichi
Ohta Kuniteru
Yoshitomi Yasunari
Berman Jack I.
Nguyen Kiet T.
Nippon Steel Corporation
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