Radiant energy – Radiant energy generation and sources
Reexamination Certificate
2008-07-29
2008-07-29
Berman, Jack I. (Department: 2881)
Radiant energy
Radiant energy generation and sources
C250S50400H, C250S492200, C222S591000
Reexamination Certificate
active
11067124
ABSTRACT:
An EUV plasma formation target delivery system and method is disclosed which may comprise: a target droplet formation mechanism comprising a magneto-restrictive or electro-restrictive material, a liquid plasma source material passageway terminating in an output orifice; a charging mechanism applying charge to a droplet forming jet stream or to individual droplets exiting the passageway along a selected path; a droplet deflector intermediate the output orifice and a plasma initiation site periodically deflecting droplets from the selected path, a liquid target material delivery mechanism comprising a liquid target material delivery passage having an input opening and an output orifice; an electromotive disturbing force generating mechanism generating a disturbing force within the liquid target material, a liquid target delivery droplet formation mechanism having an output orifice; and/or a wetting barrier around the periphery of the output orifice.
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Algots J. Martin
Bykanov Alexander N.
Cobb Dennis W.
Ershov Alexander I.
Fomenkov Igor V.
Berman Jack I.
Cymer Inc.
Hillman Matthew K.
Logie Michael J
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