Method and apparatus for estimating performance of gas tube

Details Method and apparatus for estimating performance of gas tube Method and apparatus for estimating performance of gas tube

1996-12-05

1998-09-29

Rosenberger, Richard A.

Optics: measuring and testing

With plural diverse test or art

356237, G01N 2188

Patent

active

058152539

ABSTRACT:
Method and apparatus for estimating the performance of a gas tube. The method comprising the steps of: (a) preparing a sample tube to be analyzed and cutting the sample tube in a desired size and shape; (b) examining distribution of defects and surface condition of the cut sample tube with an optical microscope; (c) analyzing structure and composition of surface defects which can not be measured in the step (b), to determine type and composition of the surface defects and shape of a surface grain; (d) analyzing structure of an inner surface-treated layer of the sample tube along the thickness thereof; and (e) synthetically analyzing data for defect density and surface roughness, which are numerically expressed through the steps (a) to (d), to define a reference data which can be used in a semiconductor manufacturing process.

REFERENCES:
patent: 4017336 (1977-04-01), Foroulis
patent: 5375760 (1994-12-01), Doko
patent: 5456768 (1995-10-01), Tomari et al.
patent: 5589148 (1996-12-01), Otsuka et al.
patent: 5620854 (1997-04-01), Holzrichter et al.

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