Method and apparatus for end point detection

Details Method and apparatus for end point detection Method and apparatus for end point detection

1990-06-22

1991-09-03

Simmons, David A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156653, 156657, 156662, 156345, 20419233, 20429832, 356222, 356437, H01L 2100

Patent

active

050451499

ABSTRACT:
A method and an apparatus for detecting the endpoint in a plasma etching process is disclosed. The invention uses a positive filter and a negative filter simultaneously to generate a first and a second signal respectively. The first and second signals are combined to form a combined signal. A change in the combined signal is indicative of the endpoint.

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