Method and apparatus for emphasizing a specimen surface region s

Details Method and apparatus for emphasizing a specimen surface region s Method and apparatus for emphasizing a specimen surface region s

1986-03-21

1988-06-21

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 3726

Patent

active

047526866

ABSTRACT:
During line-by-line scanning of a specimen surface by a primary beam of a scanning microscope, a predetermined specimen region is emphasized by comparing deflection voltages of a deflection means of the primary beam to variable comparison voltages and thereby generating a control signal which indicates whether a scanned point on the specimen surface lies within a predetermined region. The control signal is used to vary one or more scan parameters, such as the scan rate, the bandwidth of an evaluation circuit, or the intensity of the primary scan beam. An alternate embodiment includes an analog function network to generate the control signal.

REFERENCES:
patent: 3614311 (1971-10-01), Fujiyasu et al.
patent: 3711711 (1973-01-01), Dao et al.
patent: 3944829 (1976-03-01), Sato
patent: 4006357 (1977-02-01), Kanda et al.
patent: 4071759 (1978-01-01), Namae
patent: 4199681 (1980-04-01), Namae
patent: 4392054 (1984-07-01), Sato et al.
J. J. DeStafeno et al., "Scanning Electron Microscope System for Testing Circuit Devices", 19(3), IBM Technical Disclosure Bulletin, 1007-1008, (Aug. 1976).
L. Reimer and G. Pfefferkorn, Raster-Elektronenmikroskopes, Springer-Verlag, Berlin, 1977, pp. 1-3 and 109-130.

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