Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate
2005-06-14
2005-06-14
Lu, Jiping (Department: 3749)
Drying and gas or vapor contact with solids
Process
Gas or vapor contact with treated material
C034S468000, C034S469000, C034S072000, C034S073000, C034S074000, C134S095200
Reexamination Certificate
active
06904702
ABSTRACT:
The substrate drying apparatus has a substrate processing vessel1, a substrate supporting section for supporting plural substrates2in a standing condition and lined up condition in the interior of the substrate processing vessel1, fluid reservoir section3for drying provided at an upward predetermined position of the substrate processing vessel1, a first inert gas supplying section4for blowing inert gas against the drying fluid6pooled in the fluid reservoir section3for drying so as to generate droplet of the drying fluid, and for guiding the droplet towards the center of the substrate processing vessel1, and a second inert gas supplying section5for supplying inert gas vertically and downwardly so as to supply the generated droplet of the drying fluid towards the substrates2, consequently safety is improved without providing special safety device, and sufficient amount of drying fluid is supplied to the dipping boundary face of the substrate and the cleaning liquid.
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Maeda Norio
Sotojima Takazo
Daikin Industries Ltd.
Lu Jiping
Toho Kasei, Ltd
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