Method and apparatus for direct referencing of top surface...

Details Method and apparatus for direct referencing of top surface... Method and apparatus for direct referencing of top surface...

2011-02-08

2011-02-08

Chea, Thorl (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making printing plates

C310S311000

Reexamination Certificate

active

07883832

ABSTRACT:
An apparatus (and method) for referencing a surface of a workpiece during imprint lithography, includes an air bearing for mechanically referencing a surface of the workpiece, and a lithographic template coupled to the air bearing.

REFERENCES:
patent: 3969004 (1976-07-01), Schliemann
patent: 6825915 (2004-11-01), Yamauchi et al.

Affiliated with

Also associated with

Rating

Method and apparatus for direct referencing of top surface... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for direct referencing of top surface..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for direct referencing of top surface... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2646047