Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2007-02-06
2007-02-06
Hollington, Jermele (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S750010, C324S1540PB
Reexamination Certificate
active
11038485
ABSTRACT:
An apparatus for diagnosing a fault in a semiconductor device includes an laser applying unit, a detection/conversion unit, and a fault diagnosis unit. The semiconductor device is held at a state where no bias voltage is applied thereto. The laser applying unit then applies a pulse laser beam having a predetermined wavelength to the semiconductor device so as to two-dimensionally scan the semiconductor device with the pulse laser beam. The detection/conversion unit detects an electromagnetic wave generated from a laser applied position in the semiconductor device, and converts the detected electromagnetic wave into a time-varying voltage signal that corresponds to a time-varying amplitude of an electric field of the electromagnetic wave. The fault diagnosis unit derives an electric field distribution in the semiconductor device on the basis of the time-varying voltage signal to perform fault diagnosis on the semiconductor device.
REFERENCES:
patent: 5501637 (1996-03-01), Duncan et al.
patent: 5548211 (1996-08-01), Tujide et al.
patent: 5553939 (1996-09-01), Dilhac et al.
patent: 5872630 (1999-02-01), Johs et al.
patent: 5936734 (1999-08-01), Johs et al.
patent: 6211517 (2001-04-01), Pasch
patent: 6633432 (2003-10-01), Iketaki
patent: 6673637 (2004-01-01), Wack et al.
patent: 6888632 (2005-05-01), Smith
patent: 6952271 (2005-10-01), Niu et al.
patent: 6980010 (2005-12-01), Tonouchi et al.
patent: 10-135413 (1998-05-01), None
“Electron Microscope Q and A”.
Patent Abstracts of Japan (related to JP 10-135413).
Kawase Kodo
Kiwa Toshihiro
Nikawa Kiyoshi
Tonouchi Masayoshi
Yamashita Masatsugu
Griffin & Szipl, P.C.
Hollington Jermele
NEC Electronics Corporation
Riken
Vazquez Arleen M.
LandOfFree
Method and apparatus for diagnosing fault in semiconductor... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for diagnosing fault in semiconductor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for diagnosing fault in semiconductor... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3814654