Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2006-04-11
2006-04-11
Nguyen, Vinh (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S663000
Reexamination Certificate
active
07026837
ABSTRACT:
In an apparatus and method for determining a permittivity of a dielectric layer on a semiconductor wafer, a thickness of the dielectric layer is determined and a topside of the wafer is moved into contact with a spherical portion of an at least partially spherical and electrically conductive surface. An electrical stimulus is applied between the electrically conductive surface and the semiconducting material. A capacitance of a capacitor comprised of the electrically conductive surface, the semiconductor material and the dielectric layer is determined from the applied stimulus. A permittivity of the dielectric layer is then determined as a function of the capacitance and the thickness of the dielectric layer.
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O. Jeandupeux, V. Marsico, A. Acovic, P. Fazan, H. Brune and K.Kern; “Use of Scanning Capacitance Microscopy For Controlling Water Processing”; Microelectroncis Realiability 42; pp 225-231; (2002), month unavailable.
Howland, Jr. William H.
Kalnas Christine E.
Kobert Russell M.
Nguyen Vinh
Solid State Measurements, Inc.
The Webb Law Firm
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