Method and apparatus for determining crystallographic characteri

Details Method and apparatus for determining crystallographic characteri Method and apparatus for determining crystallographic characteri

1995-08-21

1996-11-19

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

H01J 3726

Patent

active

055765432

ABSTRACT:
An apparatus for determining crystallographic characteristics of a specimen having at least one crystal includes an electron beam generator, a beam deflector for adjusting the tilt and azimuth angles of the electron beam relative to the specimen, a stage for holding the specimen, an image collection system for obtaining a plurality of dark field images, a data store, and a processor for processing the dark field images to identify a plurality of crystal lattice planes associated with the crystals. The dark field images are obtained under different electron beam tilt and azimuth deflection conditions. The bright pixels in each dark field image are identified and utilized to determine the spatial location and orientation of the crystal lattice planes and the crystals themselves. An orientation image is produced that represents the orientation of the crystals within the specimen.

REFERENCES:
patent: 4608491 (1986-08-01), Kokubo
patent: 5453617 (1995-09-01), Tsuneta et al.
Experimental Techniques for Microtexture Determination, Eighth International Conference on Textures by Materials (ICOTOM 8) The Metallurgical Society, 1988, pp. 171-182. No Month.
Metallurgical Transactions A vol. 24A, Apr. 1993; Orientation Inaging: The Emergence of a New Microscopy. Brent L. Adams, Stuart I. Wright and Karsten Kunze. pp. 819-831.
Journal of Computer Assisted Microscopy; vol. 5 No. 3, 1993. A Review of Automated Orientation Imaging Microscopy (OIM).sup.1 Stuart I. Wright. pp. 207-221. No Month.

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