Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1995-10-24
1996-09-17
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250306, 250310, G01N 23203
Patent
active
055571042
ABSTRACT:
An apparatus for determining the reliability of crystallographic solutions of a specimen includes an electron beam generator, a stage for holding the specimen, an image collection system for obtaining diffraction images of crystals within the specimen, and processor for processing the diffraction images to obtain most probable indexing solutions for the crystals and to generate confidence factors associated with the most probable indexing solutions. The apparatus may utilize the confidence factors to determine the phase of the crystals within the specimen. The confidence factors may also be incorporated into reports representing the statistical confidence of various crystallographic characteristics of the specimen.
REFERENCES:
patent: 4990779 (1991-02-01), Yochitori et al.
patent: 5466934 (1995-11-01), Adams et al.
Orientation Imaging: The Emergence of a New Microscopy, Adams et al. Metallurgical Transactions A vol. 24A, Apr. 1993, pp. 819-831.
Individual Lattice Orientation Measurements Development and Application of a Fully Automatic Technique. Doctoral Dissertation by Stuart Wright; pp. 33-35 May 1992.
Dingley David J.
Field David P.
Berman Jack I.
Nguyen Kiet T.
Texsem Laboratories, Inc.
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