Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2007-05-08
2007-05-08
Larkin, Daniel S. (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
C073S104000, C356S600000, C382S108000, C382S147000, C382S149000, C382S150000, C382S154000
Reexamination Certificate
active
11157338
ABSTRACT:
An apparatus and method for detecting characteristics of a microelectronic substrate. The microelectronic substrate can have a first surface with first topographical features, such as roughness elements, and a second surface facing opposite from the first surface and having second topographical features, such as protruding conductive structures. In one embodiment, the apparatus can include a support member configured to carry the microelectronic substrate with a first portion of the first surface exposed and a second portion of the second surface exposed. The apparatus can further include a topographical feature detector positioned proximate to support member and aligned with the first portion of the first surface of the microelectronic substrate to detect characteristics, such as a roughness, of the first surface while the microelectronic substrate is carried by the support member.
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Ho Kian Seng
Neo Chee Peng
Tan Cher Khng Victor
Tan Hock Chuan
Larkin Daniel S.
Perkins Coie LLP
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