Method and apparatus for detecting pattern defects

Image analysis – Histogram processing – For setting a threshold

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

356344, 358101, 382 50, G06K 900

Patent

active

048603716

ABSTRACT:
System for detecting pattern defects wherein images of corresponding portions of two originally identical patterns are detected and two image signals representing the images are registered with each other, a second image signal of the two registered signals is shifted by a predetermined number of pixels with respect to a first image signal, thus providing shifted second image signals. Differences in brightness between the first and second image signals as well as each of the shifted second image signals are calculated within intervals corresponding to pixels on one scanning line, thus providing a first group of difference image signals, preset values are added to and substracted from the first or second image signal to provide a sum image signal and a substraction image signal. Differences in brightness between the second or first image signal and each of the sum and substraction image signals are calculated within the intervals to provide a second group of at least two difference signals, normality of one of the two patterns is decided when the first group of difference signals and the second group of difference signals have coexistent positive and negative signs within one interval and a minimum of absolute values of the first group of difference signals and the second group of difference signals is calculated when the first and second group of difference signals have all either positive signs or negative signs within one interval, and the mimimum is detected as a true defect when the minimum exceeds a predetermined threshold.

REFERENCES:
patent: 3104372 (1963-09-01), Rabinow et al.
patent: 4242662 (1980-12-01), Tsujiyama et al.
patent: 4371865 (1983-02-01), Moulton
patent: 4475234 (1984-10-01), Nishijima et al.
patent: 4491961 (1985-01-01), Sutton et al.
patent: 4614430 (1986-09-01), Hara et al.
patent: 4648053 (1987-03-01), Fridge
patent: 4700225 (1987-10-01), Hara et al.
patent: 4741044 (1988-04-01), Polomsky et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method and apparatus for detecting pattern defects does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for detecting pattern defects, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for detecting pattern defects will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2421183

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.