Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1999-04-27
2000-02-08
Kim, Robert H.
Optics: measuring and testing
By polarized light examination
With light attenuation
356375, 356237, 382270, 382274, G01B 1124
Patent
active
060233346
ABSTRACT:
The present invention provides a method and apparatus of inspecting a surface of an object article capable of precisely detecting strains or miniature defects present in the object surface. Specifically, the invention provides a method of inspecting surface irregularity of an object article having a surface of uniform or regular brightness, which comprises the steps of: gaining brightness information for a plurality of two-dimensionally distributed pixels by taking a picture of the article surface; finding stains on the article surface in response to each information obtained in the brightness information gaining step to produce a first output; finding miniature defects smaller in size than a unit pixel in response to each information obtained in the brightness information gaining step to generate a second output; switching the first output and the second output into appropriate electrical signals in an controlled manner; and displaying the switched electrical signals on a display in a viewable condition.
REFERENCES:
patent: 5073961 (1991-12-01), Takeo
patent: 5249034 (1993-09-01), Minato
Ichiba Kouzou
Itagaki Chuji
Itou Masahiro
Kim Robert H.
Toshiba Engineering Corporation
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