Method and apparatus for detecting low loss electrons in a scann

Details Method and apparatus for detecting low loss electrons in a scann Method and apparatus for detecting low loss electrons in a scann

1993-09-10

1995-04-18

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250305, H01J 3726

Patent

active

054080983

ABSTRACT:
A detector system for a low-loss electron operated scanning electron microscope providing a focused primary electron beam and producing backscattered electrons having a plurality of energy levels by interactions with a specimen disposed within the primary electron beam includes a plurality of grids, each of the grids having a corresponding predetermined potential, wherein the grids selectively filter the backscattered electrons to permit collection of low loss electrons having at least a predetermined threshold energy level at an exit side of the grids, a focusing grid disposed opposing the exit side of the grids for focusing the low loss electrons to produce convergence of the low loss electrons in a convergence region and an electron detector located substantially within the convergence region for detecting the low loss electrons. Both the electron detector and the focusing grids are maintained at predetermined detector and focusing potentials, which can be made equal to one another. A method for producing a detector system for a SEM is also disclosed.

REFERENCES:
patent: 3731096 (1973-05-01), Carter
patent: 4179604 (1979-12-01), Christou
patent: 4743757 (1988-05-01), Coates
patent: 4962306 (1990-10-01), Hodgson et al.

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