Method and apparatus for detecting emitted radiation from interr

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324753, G01R 31302, G01R 31308

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active

06028434&

ABSTRACT:
A system for evaluating defects and determining unknown parameters is provided which includes an AC source (10) coupled to a device under test (36). A radiation detector (16) detects radiation emitted from interrupted electrons flowing in the surface of the device under test (36). An analyzer (18) is coupled to the detector (16) for analyzing the output of the detector (16). A processor and memory system (38) is coupled to the analyzer (18) to assist in making determination as to defects or unknown properties of the device under test (36).

REFERENCES:
patent: 3992663 (1976-11-01), Seddick
patent: 4186338 (1980-01-01), Fichtenbaum
patent: 4761607 (1988-08-01), Shiragasawa et al.
patent: 5087873 (1992-02-01), Murphy et al.
patent: 5412330 (1995-05-01), Ravel et al.
patent: 5485080 (1996-01-01), Larrabee et al.

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