Method and apparatus for detecting defects on a disk surface

Details Method and apparatus for detecting defects on a disk surface Method and apparatus for detecting defects on a disk surface

2011-03-01

2011-03-01

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100, C356S445000, C356S239800, C356S442000

Reexamination Certificate

active

07898652

ABSTRACT:
The present invention relates to an apparatus for detecting defects on a disk surface which projects light on the disk surface by a light transmitting system, receives specula reflection light and scattered light by a light receiving system, exposes defects by performing a two-dimensional frequency filter process on a signal, and performs a defect determination process to extract a linear-shaped isolative defect candidate. Next, the present invention performs a periodicity determination process to classify and detect the periodically generated linear and circular arc defects and the isolatively generated linear and circular arc defects.

REFERENCES:
patent: 7656171 (2010-02-01), Honda et al.
patent: 2009/0237669 (2009-09-01), Hariyama et al.
patent: 2000-180376 (2000-06-01), None
patent: 2001-066263 (2001-03-01), None
patent: 3732980 (2005-10-01), None

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