Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2005-07-05
2005-07-05
Hail, III, Joseph J. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S006000, C451S008000, C451S009000, C451S010000, C451S041000, C451S285000, C451S286000, C451S287000, C451S288000
Reexamination Certificate
active
06913511
ABSTRACT:
An apparatus, as well as a method, determines an endpoint of chemical mechanical polishing a metal layer on a substrate. The method of the apparatus includes bringing a surface of a substrate into contact with a polishing pad that has a window; causing relative motion between the substrate and the polishing pad; directing a light beam through the window, the motion of the polishing pad relative to the substrate causing the light beam to move in a path across the substrate; detecting light beam reflections from the substrate and a retaining ring; generating reflection data associated with the light beam reflections; dividing the reflection data into a plurality of radial ranges; and identifying the predetermined pattern from the reflection data in the plurality of radial ranges to establish the endpoint.
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Pan Judon Tony
Swedek Boguslaw
Wiswesser Andreas Norbert
Applied Materials Inc.
Fish & Richardson
Hail III Joseph J.
McDonald Shantese
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