4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Masayasu Tanjyo

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Ion source having a mass separation device

Radiant energy – Ionic separation or analysis – Static field-type ion path-bending selecting means
Patent

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Method and apparatus for deflecting charged particles

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Method for forming an SOI substrate by use of a plasma ion...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Implanting to form insulator
Reexamination Certificate

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Profile ID: LFUS-PAI-P-398060

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