Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1980-07-09
1982-03-23
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250310, 250311, G01N 2300
Patent
active
043214681
ABSTRACT:
This invention relates to a method of correcting astigmatism in scanning electron microscopes and similar equipment which insures accurate correction of astigmatism simply by matching an astigmatism-correcting image, appearing on part of a Braun tube screen, to a predetermined point (such as a mark) on the screen, instead of depending on skill and perception. The apparatus for correcting astigmatism in scanning electron microscopes and similar equipment according to this invention provides a simple structure to implement the above astigmatism correcting method, connecting the X direction astigmatism correcting system through a first switch to one of the horizontal and vertical scanning systems and the Y direction astigmatism correcting system through the second switch to the other thereof.
REFERENCES:
patent: 3753034 (1973-08-01), Spicer
patent: 4162403 (1979-07-01), Baumgarten
patent: 4180738 (1979-12-01), Smith et al.
"The Scanning Electron Microscope: Part I, The Inst.," Oatley, Cambridge Univ. Press, 1972, pp. 71-74.
Adams Bruce L.
Anderson Bruce C.
Burns Robert E.
Kabushiki Kaisha Akashi Seisakusho
Lobato Emmanuel J.
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