Heat exchange – With retainer for removable article – Electrical component
Patent
1993-07-30
1996-04-23
Leo, Leonard R.
Heat exchange
With retainer for removable article
Electrical component
165 801, 118 52, 118728, 269903, F28F 700
Patent
active
055094643
ABSTRACT:
A rectangular substrate is cooled while it is processed under vacuum in a reaction chamber on a rectangular cooling pedestal having a cooling surface that has a downwardly curving convex shape. The substrate is clamped to the pedestal such that it conforms with a pedestal cooling surface profile. As a result the number of voids between the substrate surface and the pedestal cooling surface are minimized. This promotes consistent cooling of the substrate across the entire substrate surface when the substrate is processed at high RF power levels, by allowing the substrate to be subjected to high levels of backside cooling medium pressure which efficiently propagates heat across such gap from the substrate to the pedestal.
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Mak Alfred
Turner Norman
White John
Applied Materials Inc.
Glenn Michael A.
Leo Leonard R.
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