Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
Patent
1997-04-08
1999-01-05
Beck, Shrive
Coating apparatus
Control means responsive to a randomly occurring sensed...
Temperature responsive
118724, 118725, 427 8, 4272481, 216 59, 216 60, 216 61, 422202, C23C 1652
Patent
active
058556770
ABSTRACT:
An apparatus and a concomitant method for controlling coolant (air) flow proximate a reaction chamber within a workpiece processing system such that the temperature of a wall of the reaction chamber is maintained at a predefined target temperature. The target temperature is typically a temperature that optimizes a process concurrently being accomplished within the chamber, e.g., utilizing one temperature during deposition processes and a different temperature during cleaning processes. The apparatus contains a temperature measuring device to measure the temperature of the chamber wall. The measured temperature is compared to the predefined target temperature. A closed loop system controls the air flow proximate the chamber walls such that the measured temperature becomes substantially equal to the target temperature. Air flow control is provided by an air flow control device located within an inlet conduit that supplies air to a shroud for channeling the air past the reaction chamber. The shroud forms a portion of a housing which supports and encloses the reaction chamber.
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Anderson Roger N.
Carlson David K.
Riley Norma
Applied Materials Inc.
Beck Shrive
Meeks Timothy
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