Method and apparatus for controlling cooling and heating fluids

Details Method and apparatus for controlling cooling and heating fluids Method and apparatus for controlling cooling and heating fluids

1998-04-08

2000-09-12

Nguyen, Nam

Coating apparatus

Gas or vapor deposition

With treating means

156345, 427585, 42725528, C23C 1600, C23C 800

Patent

active

061172456

ABSTRACT:
The invention provides an apparatus and a method of regulating temperature of a component of a processing chamber comprising providing a thermal conductor thermally connected to the component, providing a controller connected to the thermal conductor, providing at least one temperature sensor connected to the component to supply temperature readings to the controller and regulating heat transfer between the component and the thermal conductor by changing the temperature of the thermal conductor. The invention also provides an apparatus and a method for providing a thermal gradient in a chamber component comprising providing a first thermal conductor at a first temperature attached to the component and providing a second thermal conductor at a second temperature attached to the component.

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patent: 5953827 (1999-09-01), Or et al.
PCT Notification of Transmittal of The International Search Report Or the Declaration, Jul. 30, 1999.

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