Method and apparatus for compensating for astigmatism in electro

Details Method and apparatus for compensating for astigmatism in electro Method and apparatus for compensating for astigmatism in electro

1981-04-15

1983-07-05

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, 250396R, G21K 108

Patent

active

043920543

ABSTRACT:
In a scanning electron microscope, astigmatism in an electron lens system is compensated for by an XY type stigmator equipped with two quadrupole lenses and their manually controlled direct current supplies. During the operation of astigmatism compensation, the supplemental current components are added stepwise to the output currents of said direct current supplies in synchronism with beam scanning in the microscope, so that the scanning image displayed in the microscope is divided into areas where astigmatism compensation is different. The operator of the microscope may accord the most sharp divided area with the center area of the scanning image by adjusting said direct current supplies, so that the output values of the direct current supplies become oprimum for astigmatism compensation.

REFERENCES:
patent: 4162403 (1979-07-01), Baumgarten
patent: 4180738 (1979-12-01), Smith et al.
patent: 4214163 (1980-07-01), Namae et al.
patent: 4321468 (1982-03-01), Kimura

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