Method and apparatus for comparing device and non-device...

Details Method and apparatus for comparing device and non-device... Method and apparatus for comparing device and non-device...

2007-10-16

2007-10-16

Smith, Matthew (Department: 2823)

Semiconductor device manufacturing: process

Including control responsive to sensed condition

C438S006000, C438S007000, C438S010000, C438S011000, C438S014000, C438S016000, C438S017000, C438S018000, C257SE21525, C356S004010, C356S005090

Reexamination Certificate

active

10980517

ABSTRACT:
The present invention provides a method and apparatus for comparing device and non-device structures. The method includes determining at least one characteristic parameter associated with at least one non-device structure on at least one workpiece and determining at least one characteristic parameter associated with at least one device structure on the at least one workpiece. The method also includes comparing the at least one characteristic parameter associated with the at least one non-device structure and the at least one characteristic parameter associated with at least one device structure.

REFERENCES:
patent: 6556947 (2003-04-01), Scheiner et al.
patent: 6582863 (2003-06-01), Stirton et al.
patent: 6587744 (2003-07-01), Stoddard et al.
patent: 6697153 (2004-02-01), Wright et al.
patent: 6751343 (2004-06-01), Ferrell et al.
patent: 6972576 (2005-12-01), Lyons et al.
patent: 7171536 (2007-01-01), Chang et al.
patent: 2004/0080998 (2004-04-01), Chang et al.
Wolf et al., Silicon Processing for the VLSI Era, 1986, Lattice Press, vol. 1, p. 235.

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