Method and apparatus for collecting defect images

Details Method and apparatus for collecting defect images Method and apparatus for collecting defect images

2006-09-12

2006-09-12

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000

Reexamination Certificate

active

07105815

ABSTRACT:
To acquire defect images even when a defect exists below an optically transparent film, an electron optical system of an electron microscope is set to a first imaging condition. A defect position of a specimen is set so as to fall within the visual field of the electron microscope, using position data of a defect of the specimen. The position of the defect is imaged by the electron microscope set to the first imaging condition to obtain a first image corresponding to the defect position. The first image is processed to determine whether a defect exists. The electron optical system is then set to a second imaging condition on the basis of the result of determination. A point imaged under the first imaging condition is imaged by the electron microscope set to the second imaging condition to acquire a second image corresponding to a defect position.

REFERENCES:
patent: 6635873 (2003-10-01), Todokoro et al.
patent: 6791095 (2004-09-01), Pan et al.
patent: 05-290786 (1993-11-01), None
patent: 07-201946 (1995-08-01), None
patent: 2000-030652 (2000-01-01), None
patent: 2001-093950 (2001-04-01), None

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