Cleaning and liquid contact with solids – Processes – With treating fluid motion
Reexamination Certificate
2005-06-15
2011-10-25
Kornakov, Michael (Department: 1714)
Cleaning and liquid contact with solids
Processes
With treating fluid motion
C134S036000, C134S902000
Reexamination Certificate
active
08043441
ABSTRACT:
A method for cleaning a substrate is provided. In this method, a flow of non-Newtonian fluid is provided where at least a portion of the flow exhibits plug flow. To remove particles from a surface of the substrate, the surface of the substrate is placed in contact with the portion of the flow that exhibits plug flow such that the portion of the flow exhibiting plug flow moves over the surface of the substrate. Additional methods and apparatuses for cleaning a substrate also are described.
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de Larios John M.
Farber Jeffrey
Korolik Mikhail
Ravkin Mike
Redeker Fred C.
Golightly Eric
Kornakov Michael
Lam Research Corporation
Martine & Penilla & Gencarella LLP
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