Method and apparatus for cleaning a substrate using...

Details Method and apparatus for cleaning a substrate using... Method and apparatus for cleaning a substrate using...

2007-09-04

2007-09-04

Perrin, Joseph L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C134S099100, C134S184000, C134S902000

Reexamination Certificate

active

10611140

ABSTRACT:
A method for processing a substrate is provided that includes generating a fluid meniscus on a surface of the substrate and applying acoustic energy to the fluid meniscus. The method also includes moving the fluid meniscus over the surface the substrate to process the surface of the substrate.

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