Method and apparatus for classifying faults based on wafer...

Details Method and apparatus for classifying faults based on wafer... Method and apparatus for classifying faults based on wafer...

2007-10-02

2007-10-02

Tsai, Carol S. W. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C702S035000, C702S105000, C714S724000, C700S110000, C700S121000, C700S266000

Reexamination Certificate

active

11180393

ABSTRACT:
The present invention provides a method and apparatus for classifying faults. The method includes accessing wafer state data associated with at least one wafer processed by at least one processing tool and sensor tool trace data associated with the at least one processing tool and determining that at least one fault occurred based upon at least one of the wafer state data and the sensor tool trace data. The method also includes selecting, in response to determining that the at least one fault occurred, a subset of a plurality of faults based upon at least one of the wafer state data and the sensor tool trace data and selecting at least one fault from the subset of the plurality of faults based upon at least one of the wafer state data and the sensor tool trace data.

REFERENCES:
patent: 6192287 (2001-02-01), Solomon et al.
patent: 6563300 (2003-05-01), Jackson et al.
patent: 6725402 (2004-04-01), Coss et al.
patent: 6766258 (2004-07-01), Stewart et al.
patent: 6850811 (2005-02-01), Stewart
patent: 7051250 (2006-05-01), Allen et al.
patent: 2004/0243256 (2004-12-01), Willis et al.
patent: 2005/0021272 (2005-01-01), Jenkins et al.
patent: 2005/0047645 (2005-03-01), Funk et al.
patent: 2005/0171627 (2005-08-01), Funk et al.
patent: 2006/0184264 (2006-08-01), Willis et al.

Affiliated with

Also associated with

Rating

Method and apparatus for classifying faults based on wafer... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for classifying faults based on wafer..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for classifying faults based on wafer... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3896054