Method and apparatus for classifying defects of an object

Details Method and apparatus for classifying defects of an object Method and apparatus for classifying defects of an object

2008-07-29

2008-07-29

Lee, Hwa (Andrew) S (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237400, C356S369000

Reexamination Certificate

active

07405817

ABSTRACT:
A method for classifying defects of an object includes irradiating lights having different polarizations onto the object to create an inspection spot on the object, collecting scattered lights generated by the irradiated lights scattering from the inspection spot, and classifying defects of the object by type of defect by analyzing the scattered lights. An apparatus for classifying defects of an object includes light creating means emitting lights having different polarizations to create an inspection spot on the object, and a detecting member for collecting scattered lights that are created from the lights scattering from the inspection spot, wherein the scattered lights are analyzed and classified in accordance with defects positioned on the inspection spot of the object.

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