Method and apparatus for characterizing shared contacts in...

Details Method and apparatus for characterizing shared contacts in... Method and apparatus for characterizing shared contacts in...

2005-12-20

2005-12-20

Deb, Anjan (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S765010, C324S762010

Reexamination Certificate

active

06977512

ABSTRACT:
Test structures are provided for accurately quantifying shared contact resistance. The test structures are built based upon an actual memory cell, which is self-aligning to allow shared contact chains through an array of test cells. A main array of test cells is built to provide a chain of shared contact resistance. Using the main array of test cells, a resistance in the shared contact chain may be measured. Supplemental arrays of test cells is built to provide a chain of poly side resistance, a chain of island side resistance, a chain of island connection line resistance, and a chain of poly connection resistance. A tester measures resistance using the test structures and uses the values to accurately determine shared contact resistance.

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patent: 6784685 (2004-08-01), Chao et al.
patent: 6815345 (2004-11-01), Zhao et al.
patent: 6836133 (2004-12-01), Kinoshita

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