Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1997-09-17
1999-10-05
Do, Diep
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324676, G01R 2726
Patent
active
059630434
ABSTRACT:
A method and apparatus for characterizing dimensions and parasitic capacitance between integrated-circuit interconnects are disclosed. The apparatus is a test structure including at least two substantially identical oscillators, at least two substantially identical counters, and a pulse generator. Each of the oscillators is connected to an integrated-circuit interconnect. Each of the counters is coupled to a respective oscillator. The pulse generator is utilized to inject a series of fixed-length clock pulses to each of the oscillators such that the parasitic capacitance of the integrated-circuit interconnects can be characterized by the ratio of oscillation periods of the oscillators to parasitic capacitances of the integrated-circuits.
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Dillon Andrew J.
Do Diep
International Business Machines - Corporation
Ng Antony P.
Salys Casimer K.
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