Material or article handling – Plural – static structures for supporting discrete loads and... – Load-underlying members
Patent
1993-06-14
1996-07-16
Werner, Frank E.
Material or article handling
Plural, static structures for supporting discrete loads and...
Load-underlying members
414222, 414939, 414940, 414935, 414217, 36446828, 29469, 1983474, 118719, B65G 104
Patent
active
055361285
ABSTRACT:
An apparatus for carrying a variety of products for effectively processing and carrying plural kinds of works such as semiconductor wafers includes a plurality of processing stations for processing plural kinds of works, a carriage system for carrying plural kinds of works, and a transfer system for delivering works between the carriage system and a processing station. A method for carrying a variety of products is realized in which the carriage system simultaneously carries plural kinds of works between the plurality of processing stations and stops at a predetermined position of the transfer system, whereas the transfer system identifies and delivers the desired kind of work to and from the carriage system.
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Hamada Toyohide
Ikeda Minoru
Iwasaki Takemasa
Kawaji Hiroyuki
Kikuchi Hiroshi
Hitachi , Ltd.
Werner Frank E.
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