Method and apparatus for calibrating degradable components...

Details Method and apparatus for calibrating degradable components... Method and apparatus for calibrating degradable components...

2006-12-26

2006-12-26

Picardat, Kevin M. (Department: 2822)

Semiconductor device manufacturing: process

Repair or restoration

C438S012000

Reexamination Certificate

active

07153709

ABSTRACT:
The present invention is generally directed to various methods and systems for calibrating degradable components using process state data. In one illustrative embodiment, the method includes providing a tool comprised of at least one process chamber, providing at least one process state sensor that is adapted to obtain process state data regarding at least one characteristic of a process environment established in the chamber in performance of a process operation, operatively coupling at least one of a new or repaired degradable component to the tool, and calibrating the new or repaired degradable component based upon the process state data. In further embodiments, the method comprises processing a plurality of additional workpieces in the tool after the new or repaired degradable components have been calibrated using process state data in accordance with one aspect of the present invention.

REFERENCES:
patent: 5808175 (1998-09-01), Chang
patent: 2002/0139418 (2002-10-01), Tinsley et al.
patent: 2005/0159911 (2005-07-01), Funk et al.
patent: 2005/0177269 (2005-08-01), Funk
patent: 2005/0187649 (2005-08-01), Funk et al.
patent: 2005/0284570 (2005-12-01), Doran et al.

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