Method and apparatus for calibrating a control apparatus for def

Details Method and apparatus for calibrating a control apparatus for def Method and apparatus for calibrating a control apparatus for def

1997-04-18

1998-11-03

Barlow, John

Data processing: measuring, calibrating, or testing

Calibration or correction system

Linearization of measurement

702 95, G01C 2504

Patent

active

058324151

ABSTRACT:
In a method for calibrating the deflection control of a laser beam a light-sensitive medium (5) is exposed to a laser beam (2) at predetermined positions for generating a test pattern (20), thereafter digitized partial pictures of pattern portions (21) of the test pattern (20) are produced and the digitized partial pictures are composed to a digitized overall picture of the test pattern (20). The correction data for the control (4) for deflecting the laser beam (2) are calculated on the basis of a comparison of actual positions of the laser beam (2) on the digitized overall picture with predetermined desired coordinates.

REFERENCES:
patent: 4453085 (1984-06-01), Pryor
patent: 4585342 (1986-04-01), Lin et al.
patent: 5430666 (1995-07-01), DeAngelis et al.
patent: 5460758 (1995-10-01), Langer et al.
H. Winterberg, et al. "Topometrische 3D-KoordinatenmeBtechnik", Laser in der Technik, Vortrage des 11. Internationalen Kongresses, Laser 93, Springer Verlag, pp. 195-198 (partial Translation).
P. E. Verboven, "Distortion Correction Formulas for Pre-Objective Dual Galvanometer Laser Scanning", Applied Optics, 1988 No. 20, pp. 4172-4173.
Patent Abstracts of Japan, vol. 18, No. 250 (P-1736), May 15, 1994 (JP,A,06-34349.

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