Method and apparatus for baking out a gate valve in a semiconduc

Details Method and apparatus for baking out a gate valve in a semiconduc Method and apparatus for baking out a gate valve in a semiconduc

1996-04-17

1999-10-12

Walberg, Teresa

Electric heating

Heating devices

Combined with diverse-type art device

219535, 219540, 219464, 432225, 137341, F16K 4900

Patent

active

059650460

ABSTRACT:
A device for achieving vacuum conditions more quickly in a semiconductor processing system having a vacuum pump, a gate valve and a chamber includes a rigid body containing heating elements that contact the surface of the gate valve. The device may include a U-shaped retainer clip for holding the device to the gate valve. A method for heating a gate valve to drive off contaminants involves heating the lower portion of the gate valve to drive contaminants towards the vacuum pump.

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