Method and apparatus for background correction in analysis of a

Details Method and apparatus for background correction in analysis of a Method and apparatus for background correction in analysis of a

1991-04-04

1992-07-07

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, 250397, 378 46, G01N 2320

Patent

active

051285452

ABSTRACT:
A method and apparatus for background correction of the measured data in analysis of a specimen surface by scanning the surface with an electron beam, wherein a signal occurring from an element to be analyzed contained in the specimen is detected to obtain a two-dimensional distribution data of the level of the signal in a predetermined area of the specimen surface; a specimen current induced in the specimen by the scanning is detected to obtain a two-dimensional distribution data of the specimen current in the predetermined specimen surface area; a relation between the background intensity and specimen current of the specimen is calculated from the background intensity and specimen current measured on at least two points in the specimen surface area; a two-dimensional distribution data of the background intensity is calculated from the two-dimensional distribution data of the specimen current by using the calculated relation; and the calculated two-dimensional distribution data of the background intensity is subtracted from the two-dimensional distribution data of the signal level thereby to make a background correction of the distribution data of the signal level.

REFERENCES:
patent: 4219731 (1980-08-01), Migitaka
patent: 4697080 (1987-09-01), King
patent: 4980639 (1990-12-01), Yoshizawa et al.
patent: 5055679 (1991-10-01), Ninomiya et al.

Affiliated with

Also associated with

Rating

Method and apparatus for background correction in analysis of a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for background correction in analysis of a , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for background correction in analysis of a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1831504