Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate
2006-07-25
2006-07-25
Hassanzadeh, Parviz (Department: 1763)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
For liquid etchant
C156S345120
Reexamination Certificate
active
07081182
ABSTRACT:
The present invention relates to a method and apparatus for automatically measuring the concentration of total organic carbon (TOC) in chemicals and ultra-pure water that are used in a wet etch process. The apparatus includes a sampling line extending from a processing bath, and a pump, for extracting a fluid sample from the processing bath, a buffer for filtering foreign material or air bubbles from the fluid, and an analyzer for analyzing the concentration of TOC in the fluid.
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Gill June-Ing
Heo Yong-Woo
Kim Kyung-Dae
Ryu Jae-Jun
Hassanzadeh Parviz
MacArthur Sylvia R.
Samsung Electronics Co,. Ltd.
Volentine Francos & Whitt PLLC
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