Method and apparatus for automatically focusing an electron beam

Details Method and apparatus for automatically focusing an electron beam Method and apparatus for automatically focusing an electron beam

1978-10-10

1980-04-22

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250396R, G01M 2300

Patent

active

041996810

ABSTRACT:
An electron beam device comprising a scanning means for automatically focusing said electron beam and a related method. The scanning means is controlled at all times to operate under optimum magnification and scanning speed conditions.

REFERENCES:
patent: 3748467 (1973-07-01), Suganuma
patent: 3937959 (1976-02-01), Namae
patent: 3942005 (1976-03-01), Watanabe
patent: 4045669 (1977-08-01), Kamimura

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