Method and apparatus for automatically correcting...

Details Method and apparatus for automatically correcting... Method and apparatus for automatically correcting...

2008-04-08

2008-04-08

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S39600R, C250S311000, C250S397000, C250S398000, C250S492300, C250S305000, C250S306000

Reexamination Certificate

active

11293846

ABSTRACT:
There is disclosed a method and apparatus for automatically correcting a charged-particle beam with an aberration corrector without the operator performing manual operations. The apparatus has an extraction portion for extracting the profile of the beam from images of a surface of a sample, a calculation unit for calculating the amount of axial deviation of the apparatus from the position of the extracted profile of the beam, and a feedback unit for automatically applying feedback to the aberration corrector or to the objective lens according to the calculated amount of axial deviation.

REFERENCES:
patent: 6723997 (2004-04-01), Matsuya et al.
patent: 6858844 (2005-02-01), Zach
patent: 7145154 (2006-12-01), Uno
“Aberration correction and its automatic control in scanning electron microscopes” Shinobu Uno, Kazuhiro Honda, Natsuko Nakamura, Miyuki Matsuya and Joachim Zach, Optik 116, 2005, pp. 438 to 448, Publication date: Sep. 2, 2005.
Joachim Zach and Maximilian Haider, “Aberration correction in a low voltage SEM by a multipole corrector”,Nuclear Instruments and Methods in Physics Research, Section A 363 (1995), pp. 316-325, Germany.

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