Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Patent
1995-11-17
1998-07-14
Westin, Edward P.
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
2502014, 356376, G01N 2184, G01B 1124
Patent
active
057808660
ABSTRACT:
A method for automatic focusing and three dimensional profile detection and an apparatus for automatic focusing and three dimensional profile detection have the purpose of detecting a three dimensional profile of the state of mounting of parts or soldering on a board without the affects of warp, even if the board of the detection object is warped, as if the surface of the board were on a flat plane. The board surface height is detected in a plurality of windows corresponding to stage scanning regions from a three dimensional profile signal of the part-mounted board detected by a height detection optical system. The board height or inclination in the next window is forecasted from the board surface height and the control history of stage height in the already-detected plurality of windows. Based on the forecasted board surface height or inclination, the speed or height in the Z direction of a Z-stage is controlled according to a feedforward method with scanning so as that the board surface and the focal plane of the height detection optical system are made coincident.
REFERENCES:
patent: 4650333 (1987-03-01), Crabb et al.
patent: 4677302 (1987-06-01), Chiu et al.
patent: 5103105 (1992-04-01), Ikegaya et al.
Matsuyama Yukio
Ninomiya Takanori
Sasazawa Hideaki
Yamamura Hisae
Hitachi , Ltd.
Pyo Kevin
Westin Edward P.
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