Method and apparatus for automatic calibration of robots

Details Method and apparatus for automatic calibration of robots Method and apparatus for automatic calibration of robots

2005-02-15

2005-02-15

Walsh, Donald P. (Department: 3653)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Robot control

C700S255000, C700S258000, C700S218000, C318S568130, C318S568110, C318S568100, C901S046000

Reexamination Certificate

active

06856863

ABSTRACT:
An automatic calibration method and apparatus for robots, particularly robots used in substrate processing systems. The method for calibrating a robot in a processing chamber comprises: determining a useable free-space for the robot in a processing system; determining a distance between a position of a robot end effector and a target position in the useable free-space; and generating a path within the useable space from the position of the robot end effector to the target position using incremental displacements of the robot end effector that minimize the distance between the robot end effector and the target position. The apparatus for calibrating a robot in a processing system comprises: a sensor disposed at a location to be taught; a receiver disposed on a robot end effector; and a microprocessor connected to receive signals from the sensor and the receiver to determine a distance between the sensor and the receiver, wherein the microprocessor generates a path using incremental movements that minimizes the distance between the sensor and the receiver.

REFERENCES:
patent: 4685862 (1987-08-01), Nagai et al.
patent: 5177563 (1993-01-01), Everett et al.
patent: 5535306 (1996-07-01), Stevens
patent: 5655060 (1997-08-01), Lucas
patent: 5783834 (1998-07-01), Shatas
patent: 5876325 (1999-03-01), Mizuno et al.
patent: 6128585 (2000-10-01), Greer
patent: 6224312 (2001-05-01), Sundar
Sundar, Satish. “Improved Throughout Using Time-Optimal Motion Planning and Design,” Automation/Simulation & Modeling/Software, Mar. 15, 1996, 6 pages.

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