Data processing: artificial intelligence – Knowledge processing system – Knowledge representation and reasoning technique
Reexamination Certificate
2011-07-26
2011-07-26
Gaffin, Jeffrey A (Department: 2129)
Data processing: artificial intelligence
Knowledge processing system
Knowledge representation and reasoning technique
Reexamination Certificate
active
07987150
ABSTRACT:
Automated defect sourcing systems identify root-causes of yield excursions due to contamination, process faults, equipment failure and/or handling. They perform this function in timely manner and provide accurate and timely feedback to address and contain the sources of yield excursion. A signature repository stores known wafer surface manufacturing defect types as set of rules. The signature of a manufacturing defect pattern is associated with the equipment or process that causes the defects, and is used to source the manufacturing defects and to provide process control for changing and/or stopping yield excursion during fabrication. A defect signature rule-based engine matches wafer defects against the signature repository during wafer fabrication. Once the defect signature is detected during fabrication, handling and/or disposing the root-cause of the corresponding defect is facilitated using messages according to an event handling database. Optionally, a real-time process control for wafer fabrication is provided.
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Dinh Luan Thien
Luu Victor V.
Nguyen Phong Van
Poreda John
Trinh Thieu Nguyen
Chang Li-Wu
Fernandez & Associates LLP
Gaffin Jeffrey A
SIGLaz
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