Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2008-04-15
2008-04-15
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S311000, C250S492100, C250S492200, C250S398000, C356S401000, C430S030000
Reexamination Certificate
active
07358493
ABSTRACT:
A method and apparatus according to the present invention define optimal conditions for a scanning electron microscope (SEM), preferably a critical dimension scanning electron microscope (CDSEM). The present invention provides an image quality monitor that utilizes image processing and optimization to maintain image quality at a desired level. Images from a stage sample are automatically collected, while microscope operational parameters are determined based on image processing to enable continuous monitoring of microscope operation. The technique may be performed manually or automatically and generates set points for beam conditioning elements to produce or maintain ideal beam conditions to enhance image quality. The present invention generates data indicating optimized values for each beam alignment parameter. The optimized values are applied to the internal microscope values to optimize the beam. The results may be provided to the technician, a data storage system or directly to the microscope control mechanisms.
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Gould Christopher
Roberts William
Berman Jack I.
Edell, Shapiro & Finnan. LLC
Infineon Technologies Richmond LP
Sahu Meenakshi S
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